TiO2 films have been deposited by sol gel spin coating technique onto glass and p-Si substrates. TiO2 films were prepared using two different sols. The physical properties of the TiO2 films were examined based on two different parameters. In the first study, the pH value of the solution was changed, in the second study, the ageing time of the solution were changed. X-ray diffraction (XRD) study showed that TiO2 films have tetragonal (anatase phase) crystal structure. The best crystallization was observed in TiO2 films deposited using 144 hours of aging solution for both substrates (glass and p-Si). The surface morphology of the deposited film was characterized by field emission scanning electron microscope (FESEM). FESEM images showed that the surfaces of the TiO2 films were highly porous. The optical band gap (  

Keywords - TiO2, sol gel spin coating, pH value, ageing time, physical properties

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